In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate

ABSTRACT

Cantilevers, SPM tips and nanomachining tools are created in the plane of wafers to obtain new and high performance parts. The method produces more parts for any given wafer, then conventional methods and allows every part on any given wafer to be different from any other, permitting great freedom in new SPM and nanomachining techniques and product development.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No. 15/226,873, filed Aug. 2, 2016, which is a continuation of U.S. patent application Ser. No. 14/207,088, filed Mar. 12, 2014 (now U.S. Pat. No. 9,423,693), which claims priority to U.S. Provisional Patent Application No. 61/800,971, filed Mar. 15, 2013. The disclosures of these applications are incorporated by reference herein in their entirety.

The entire disclosures of the following U.S. patents and patent applications are incorporated by reference for all purposes:

-   -   U.S. Pat. No. 7,571,638, filed Sep. 12, 2006, entitled “Tool         tips with scanning probe microscopy and/or atomic force         microscopy applications,” which is a continuation-in-part of     -   U.S. patent application Ser. No. 11/382,651, filed May 10, 2006,         entitled “Tool Tips with Scanning Probe Microscopy and/or Atomic         Force Microscopy Applications,” which claims the benefit of each         of the following four U.S. provisional applications:     -   U.S. Provisional Patent Application No. 60/679,926, filed May         10, 2005, entitled “Manufacturing of Micro-Objects Such as         Miniature Diamond Tool Tips”;     -   U.S. Provisional Patent Application No. 60/698,356, filed Jul.         11, 2005, entitled “Manufacturing of Micro-Objects Such as         Miniature Diamond Tool Tips”;     -   U.S. Provisional Patent Application No. 60/707,840, filed Aug.         11, 2005, entitled “Manufacturing of Micro-Objects Such as         Miniature Diamond Tool Tips”; and     -   U.S. Provisional Patent Application No. 60/711,899, filed Aug.         25, 2005, entitled “Manufacturing of Micro-Objects Such as         Miniature Diamond Tool Tips.”

BACKGROUND OF THE INVENTION

The present invention relates generally to the manufacture and handling of micro-objects such as shaped tool heads or tips, and more particularly to the manufacture of Micro Electro Mechanical Systems (MEMS) used in conjunction with Scanning Probe Microscopes, Optical Microscopes, Electron Microscopes and Ion microscopes.

Manufacturing and other processes pertaining to scanning probe microscopy SPM, nanomachining, micromachining, machining, optics, biotechnology, and biomedicine often require highly specialized miniature tools, imaging techniques and measuring instruments. Such tools typically consist of a shaped tool head formed and parted from a diamond, silicon nitride, silicon carbide, boron nitride, boron carbide, diamond-like carbon, sapphire or other hard material work piece and mounted on a body, cantilever and/or handle. Depending on the particular application, the spatial orientation of the measuring and tool head relative to the tool body, once mounted thereupon, may be critical to the usefulness of the miniature tool. Furthermore, it is desirable to be able to have many different specialized SPM tips on one wafer since the cost of using MEMS manufacturing for all the possible desirable tip, tool and actuation configurations prohibit the expansion of use of these nanotechnologies for research, and in industry.

The specific and actual manufacturing methods herein describe a means for building tool and sensing structures with widely varying properties and effective use of coated or grown obdurate films so as to substantially expand the use and capability of present SPM, TEM, SEM, ion microscope and other measuring and nanomachining and nanomodification and additive processes techniques. In addition, each unique design is assigned an etched-in identifier so that it may be identified even when mounted into a tool or microscope.

SUMMARY OF THE INVENTION

The present invention relates generally to the manufacture and handling of micro-objects such as shaped tool heads or SPM tips, and nanomachining SPM tips, metrology SPM tips, and more particularly to the manufacture of miniature tools incorporating or consisting of shaped structures.

Manufacturing and other processes pertaining to scanning probe microscopy, nanomachining, micromachining, machining, optics, biotechnology, and biomedicine often require highly specialized miniature tools or tips. Such tools typically consist of a shaped tool head formed and parted from a diamond or other hard material work piece and mounted on a body or handle. Depending on the particular application, the spatial orientation of the tool head relative to the tool body, once mounted thereupon, may be critical to the usefulness of the miniature tool or tip.

Execution of present methods for fabricating, identifying, handling, aligning and mounting small structures, particularly structures smaller than 200 microns (referred to as micro-objects), is highly difficult and often results in uncertain orientation of the fine tool head structure relative to the tool body. Present methods for cantilever and tip manufacture also limit the length of tool pieces and make it necessary to provide substantial extra unused material in the tool head which can be expensive and limiting in the use of special high performance materials.

One aspect of the present invention is to provide a method for combining tens, hundreds, or thousands of different and unique tips and tools on one wafer to make diverse functions reasonably inexpensive for research, industrial nanomachining, and metrology. It is a further aspect to have an etched identification such that each cantilever or other part when mounted as it is typically on edge to engage the surfaces in question can be distinguished in function from other mounted tips or tools.

Another aspect of the present invention is to provide the ability to use robust materials such as diamond, nanodiamond, ultrananodiamond, amorphous diamond, silicon nitride, silicon carbide, boron nitride, or boron carbide in a thin and inexpensive layer grown or coated on the wafer of all the parts as we have successfully done and in the process create nanoscale sharp and precise structures suitable for SPM tips and/or tools.

In yet another aspect, we can create cantilevers with unique and special properties pushing out the performance limits of present nanotech instruments and SPM microscopes because by building each structure in the plane of the wafer we are free to make any angle, curve or complex structure which has never before been possible.

The following detailed description together with the accompanying drawings will provide a better understanding of the nature and advantages of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic illustration of a general cantilever mounting component;

FIG. 2 is a top and side view of tuning fork sensor and cutting tip according to an embodiment of the present invention;

FIG. 3 is a side view and detail view of an extremely low force cantilever with special carbon nanotube tip channel according to an embodiment of the present invention;

FIG. 4 is a view of a photomask image of a tuning fork and nanomachining cantilever and tip according to an embodiment of the present invention;

FIG. 5 is a view of the end of cantilever showing the tip formed from the tough and very thin coating on the silicon substrate according to an embodiment of the present invention; and

FIG. 6 is a view of a complete tip and extremely long cantilever component with mounting handle, names and copyrights according to an embodiment of the present invention.

DESCRIPTION OF SPECIFIC EMBODIMENTS

In embodiments of the present invention, such techniques can be used to fabricate cantilevers, SPM tips and special measuring and nanomodification tools.

FIG. 1 shows the table of devices with ID numbers 100 this is both the experimental list used to produce first parts and an example of the tip length, angle with ID number notched into the cantilever body 120, cantilever length 100 and wet etch precision alignment trench 140 that permits the easy identification of parts once mounted on any respective carrier such as 110.

FIG. 2 includes a cross section view and top down view of a tuning fork body 200, tuning fork 220, and nanomachining tip 210. In addition we see four other tip types 230 with its precision atomically accurate V-groove with multiwall carbon nanotube mounted in the groove, 240 and 245 with both the V-groove 240 and the sidewall probe 245. In addition we have the V 250 and side tip 255, the whole cantilever view end on and from above 280. At 270 we see the breakaway which has further improved in FIG. 4, 410. As shown the design is such that the upper tuning fork stub identical to lower stub 230 has only a small gap to the cantilever and nanomachining tip structure 210 where when it engages the stub the stiffness of the cantilever increases many fold.

FIG. 3 is a side cross section of the very low force folded cantilever 310 and tip 320 along with the complete body, tip, cantilever assembly 300. Any of the listed tip types and any tip angle may be used to construct these assemblies. The force in contact mode of these tips for SPM use is more than 300% less than any other available contact tip. The ease with which we can produce diamond or silicon nitride coated versions with excellent wear characteristics and sharp nearly vertical sides opens up many heretofore undoable measures and experiments.

FIG. 4 shows a top view and angled view of the actual tuning fork and nanomachining part 400. The top view of the mask element shows the break-away 410 used to shorten the overall body length (which is specifically lengthened to reach into the lens area of Optical, SEM, TEM and Ion microscopes). The unique pit code identifying the part is at 420 and the tuning fork itself at 430. Looking at the actual part the nanomachining tip is at 440 while the precision trench 470 has a multiwall carbon nanotube as the actual tip 470.

The tip is placed into the self-aligning trench 470 along with all other target trenches across the entire wafer using any of the common systems available for picking and placing nanotubes. The perfectly aligned trench insures that the nanotube is precisely perpendicular to the surface it measures or changes. The trench is atomically smooth and its alignment is precisely related to the crystal planes of the silicon wafers on which it is fabricated. This alignment is at least 10 times better than that available by present other means.

The tuning fork can measure surface interactions by the tip in its active arm even though it may be hidden under a microscope objective. It does so by vibrating the tuning fork and then using light beam 460 reflecting off of both 45-degree fork ends 450 and using the small changes in path length determine whether the base resonance is being affected the tip interaction with the surface. This basic MEMS light tuning fork operates with a common light source like a stabilized laser a responsive detector and a resonance subsystem—said system being identical with those commonly used for the common arrangement of the light being reflected off the back side of the cantilever from above.

FIG. 5 shows the a tip 510 and cantilever end 500 formed from a thin layer of silicon nitride shaped like a tip under which the original silicon has been substantially etched away so that the tip is about 100 nanometer thick and tapers to a point of about 15 nanometers in accord with the embodiments in the invention.

FIG. 6 shows the wafer top view of another cantilever assembly 600 and its carrier and handle 650. This a complete experimental part ready be transferred to a specific SPM holder. This very long 300-micron tip 610 is built with a precision trench like 470, a silicon nitride tip, and a cantilever 620. The identification code is at 630 and the break-away to release the cantilever assembly at its final destination is at 640. The history of a development which started in 2007 is reflected in the dates on the silicon, and SEM images (with dates).

In use the method for manufacturing is to expose a silicon oxide coating on a silicon-on-insulator (SOI) or plain wafer to photolithography and/or e-beam lithography to etch the trench using a wet etch process. Then the wafer is coated (or has grown) silicon nitride, silicon carbide, boron nitride, boron carbide, diamond, nanodiamond, ultrananocrystalline diamond, diamond-like carbon, or other suitable tip material. The wafer is then photolithographically and/or E-beam lithographically processed, and etched by dry etch and wet etch steps until all the features are complete and all appropriate structures are released. The entire wafer is then taken to have carbon nanotubes attached in the trenches (or groove) 290. The components as required are checked and clean room packaged for testing. In other embodiments the wafer may be quartz, germanium, silicon carbide, or sapphire.

Thus, although the invention has been described with respect to specific embodiments, it will be appreciated that the invention is intended to cover all modifications and equivalents within the scope of the following claims. 

What is claimed is:
 1. A method of making scanning probe microscopy (SPM) probes and tools, the method comprising: providing a wafer characterized by a wafer plane; lithographically creating a shape, suitable for use in SPM and nanomachining, the shape extending in the wafer plane, wherein the shape includes a cantilever structure extending in the wafer plane; and incorporating a multiwall carbon nanotube into the cantilever structure.
 2. The method of claim 1 wherein incorporating the multiwall carbon nanotube into the shape includes: forming a self-aligning trench that extends along the wafer plane; and placing the nanotube in the self-aligning trench.
 3. The method of claim 1 wherein the multiwall carbon nanotube is incorporated as a tip for the cantilever structure.
 4. The method of claim 1 wherein the multiwall carbon nanotube is placed in the wafer plane.
 5. The method of claim 1 wherein lithographically creating the shape includes creating a body extending in the wafer plane and a tuning fork structure extending in the wafer plane from a forward end of the body, the tuning fork structure having first and second tines.
 6. The method of claim 5 wherein lithographically creating the shape further includes creating a tip feature that extends from the second tine in the wafer plane in a direction away from the first tine.
 7. The method of claim 6 wherein the multiwall carbon nanotube extends in the wafer plane through the tip feature.
 8. The method of claim 5 wherein incorporating the multiwall carbon nanotube into the shape includes placing the multiwall carbon nanotube such that the multiwall carbon nanotube contacts the first and second tines.
 9. The method of claim 5 wherein the multiwall carbon nanotube is placed such that an end portion of the multiwall carbon nanotube forms a tip extending from the second tine in the wafer plane in a direction away from the first tine.
 10. The method of claim 5 wherein incorporating the multiwall carbon nanotube into the shape includes: forming a self-aligning trench that extends along the wafer plane, the trench having a first portion formed in the first tine and a second portion formed in the second tine; and placing the multiwall carbon nanotube in the self-aligning trench.
 11. The method of claim 10 wherein the multiwall carbon nanotube is placed such that an end portion of the multiwall carbon nanotube forms a tip.
 12. The method of claim 5 wherein the tuning fork shape is created such that the first and second tines have angled end surfaces.
 13. The method of claim 12 wherein the angled end surfaces are angled at 45 degrees to an axis of the beam.
 14. The method of claim 5, wherein lithographically creating the shape further includes creating a cantilever arm that extends in the wafer plane from the forward end of the body in the same direction as the tuning fork structure, wherein the cantilever arm is positioned such that the first tine is located between the cantilever structure and the second tine, and wherein the cantilever arm is stiffer than the tuning fork structure.
 15. A tool shape for a scanning probe microscope (SPM), the tool shape comprising: a cantilever structure lithographically formed in a wafer plane of a wafer; and a multiwall carbon nanotube disposed at least partially on a portion of the cantilever structure and extending along the wafer plane.
 16. The tool shape of claim 15 wherein the multiwall carbon nanotube provides a tip attached near an end of the cantilever structure.
 17. The tool shape of claim 15 wherein the cantilever structure includes a self-aligning trench formed in and extending along the wafer plane and wherein the nanotube is disposed in the self-aligning trench.
 18. The tool shape of claim 15 wherein the cantilever structure includes a body formed in the wafer plane and a tuning fork structure extending in the wafer plane from a forward end of the body, the tuning fork structure having first and second tines.
 19. The tool shape of claim 18 further comprising a tip feature extending from the second tine in the wafer plane in a direction away from the first tine.
 20. The tool shape of claim 18 wherein the multiwall carbon nanotube extends along the wafer plane through the tip feature.
 21. The tool shape of claim 18 wherein the multiwall carbon nanotube contacts the first and second tines.
 22. The tool shape of claim 18 wherein an end portion of the multiwall carbon nanotube forms a tip extending from the second tine in the wafer plane in a direction away from the first tine.
 23. The tool shape of claim 22 wherein the first tine and the second tine each have a portion of a self-aligning trench formed therein and wherein the multiwall carbon nanotube is disposed in the self-aligning trench.
 24. The tool shape of claim 18 wherein the first and second tines have angled end surfaces.
 25. The tool shape of claim 24 wherein the angled end surfaces reflect light such that changes in a distance between the angled end surface of the first tine and the angled end surface of the second tine are detectable based on changes in path length of the reflected light.
 26. The tool shape of claim 18 further comprising a cantilever arm that extends in the wafer plane from the forward end of the body in the same direction as the tuning fork structure, wherein the cantilever arm is positioned such that the first tine is located between the cantilever arm and the second tine, and wherein the cantilever arm is stiffer than the tuning fork structure. 